Advanced CMOS Process Technology: v. 19 (V L S I by J Pimbley

By J Pimbley

complicated CMOS approach know-how is a part of the VLSI Electronics Microstructure technological know-how sequence. the most subject of this ebook is complementary metal-oxide semiconductor or CMOS expertise, which performs an important half within the electronics structures. the themes coated during this booklet diversity from metallization, isolation suggestions, reliability, and yield.
The quantity starts off with an introductory bankruptcy that discusses the microelectronics revolution of the 20 th century. Then bankruptcy 2 places specialise in the CMOS units and circuit historical past, discussing CMOS capacitors and box impact transistors. Metallization subject matters and ideas are lined in bankruptcy three, whereas isolation recommendations are tackled in bankruptcy four. long term reliability of CMOS is the subject coated in bankruptcy five. ultimately, the facility of semiconductor expertise to yield circuits is mentioned in bankruptcy 6.
The publication is very addressed to engineers, scientists, and technical managers.

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